发明名称 SEMICONDUCTOR ON GLASS INSULATOR WITH DEPOSITED BARRIER LAYER
摘要 <p>Methods and apparatus provide for: a silicon on insulator structure, comprising: a glass substrate; a layer of semiconductor material; and a deposited barrier layer of between about 60 nm to about 600 nm disposed between the glass substrate and the semiconductor material, where the glass substrate and semiconductor material are bonded together via electrolysis.</p>
申请公布号 WO2007024549(A2) 申请公布日期 2007.03.01
申请号 WO2006US31726 申请日期 2006.08.15
申请人 CORNING INCORPORATED;COUILLARD, JAMES, G.;GADKAREE, KISHOR, P. 发明人 COUILLARD, JAMES, G.;GADKAREE, KISHOR, P.
分类号 H01L21/30 主分类号 H01L21/30
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