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发明名称
Verfahren zum Planieren von Halbleiterwafern
摘要
申请公布号
DE19736145(B4)
申请公布日期
2007.03.01
申请号
DE19971036145
申请日期
1997.08.20
申请人
NATIONAL SEMICONDUCTOR CORP.
发明人
SNYDER, JOHN
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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