| 摘要 |
PROBLEM TO BE SOLVED: To reduce the quantity of particles remaining in a chamber. SOLUTION: A cylinder 127 covering the periphery of a part of a rotating shaft 106, a small-diametral flange 128 formed at an end on the rotor 104 side of the cylinder 127, and a rotating-shaft seal protective plate 126 with a large-diametral flange 129 formed at the end on the rotating-shaft seal 124 side of the cylinder 127, are arranged between a rotor 104 and a rotating-shaft seal 124. The rotating-shaft seal protective plate partitions the inside of the chamber 102 into a rotor and a rotating-shaft sealing by the large-diametral flange, and guides the projected substances (a releasing liquid and a wash water) of a liquid to a discharge opening 118 by the small-diametral flange. COPYRIGHT: (C)2007,JPO&INPIT
|
