发明名称 Exposure method for making separator
摘要 An exposure method for making a separator includes the steps of providing a substrate on which a positive photoresist is coated, providing a mask having a light-transmissible region and a light-blocking region, and performing first-time and second-time exposures respectively sequentially by using UV light obliquely irradiating on the mask with a respective included angle between a surface direction of the mask and an incident direction of the UV light.
申请公布号 US2007048677(A1) 申请公布日期 2007.03.01
申请号 US20050211520 申请日期 2005.08.26
申请人 WINTEK CORPORATION 发明人 KUO CHIEN-CHUNG
分类号 G03F7/20 主分类号 G03F7/20
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