| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle storage container of which breakage and deformation are suppressed to be able to reduce mixing of foreign matters. <P>SOLUTION: The pellicle storage container 5 has a tray 3 and a cap body 4 being fitted with the tray 3 and stores a pellicle 1 in a space formed by the tray 3 and the cap body 4, wherein the tray 3 and/or cap body 4 include holding parts 6 capable of holding the pellicle storage container 5, and the holding parts 6 each include a reinforcing means such as an insert member 9 having rigidity higher than that of each holding part 6 at its inside. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
