| 发明名称 |
YTTRIA SINTERED BODY, ELECTROSTATIC CHUCK, AND PRODUCTION METHOD OF YTTRIA SINTERED BODY |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an yttria sintered body excellent in corrosion resistance and mechanical strength and having an adjusted volume resistivity. SOLUTION: The yttria sintered body comprises 5-40 vol.% silicon carbide and has a volume resistivity of 1×10<SP>1</SP>-1×10<SP>17</SP>Ωcm at room temperature. COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007051045(A) |
申请公布日期 |
2007.03.01 |
| 申请号 |
JP20050239115 |
申请日期 |
2005.08.19 |
| 申请人 |
NGK INSULATORS LTD |
发明人 |
AIHARA YASUFUMI;MATSUDA HIROTO |
| 分类号 |
C04B35/50;H01L21/683 |
主分类号 |
C04B35/50 |
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