发明名称 POLARIZER
摘要 PROBLEM TO BE SOLVED: To provide a polarizer which has small wavelength-dependence of transmissivity of TM polarization. SOLUTION: A groove structure is formed by arranging metal wires 2 in parallel on a substrate 1, wherein, by making each of metal wires 2 thick on the substrate 1 and thin on the upper part thereof, interface reflection at both parts can be reduced. In order to exhibit the effect satisfactorily, it is preferable that area (that is, the ratio between a width of a metal part and a period of a periodic structure) of the lower surface of metal (the side of contacting to the substrate) is two times or more of the area of the upper surface of metal (the side opposite to the substrate); W<SB>1</SB>/P≥2W<SB>u</SB>/P, wherein W<SB>1</SB>is the width of metal part on the substrate, W<SB>u</SB>is the width of metal part opposite to the substrate and P is the period. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007052084(A) 申请公布日期 2007.03.01
申请号 JP20050235596 申请日期 2005.08.16
申请人 NIKON CORP 发明人 TSUKAMOTO HIROYUKI
分类号 G02B5/30 主分类号 G02B5/30
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