| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type capacitive displacement sensor of an area change measuring system capable of reducing a mechanical installation error and an error caused by inconsistency between a driving direction and a measuring direction. SOLUTION: This contact type capacitive displacement sensor of the present invention includes: a fixed element provided with a fixed plate, and a fixed conductive pattern formed on the fixed plate and having a periodic pattern of a conductor; a moving element provided with a moving plate, and a moving conductive pattern formed on the moving plate and having the periodic pattern of the conductor, contacting with the fixed element each other, and movable to be relatively displaced each other; an electric power source for supplying electric power to the sensor; and a signal detecting means for detecting a change of an electric capacity between the fixed element and the moving element. The fixed element and the moving element have respectively insulation films related to the corresponding conductive patterns, and the electric capacity is fluctuated between the fixed conductor and the moving conductor along with fluctuation in an overlapped area therebetween, when the both conductors are moved relatively. COPYRIGHT: (C)2007,JPO&INPIT
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