发明名称 Method and apparatus providing integrated color pixel with buried sub-wavelength gratings in solid state imagers
摘要 Imaging devices utilizing sub-wavelength gratings to separate the spectral components of the natural white light are disclosed. This disclosed method and apparatus redirects the light to be collected onto separate photosensors for different wavelengths to provide improved quantum efficiency.
申请公布号 US2007045685(A1) 申请公布日期 2007.03.01
申请号 US20050209774 申请日期 2005.08.24
申请人 MICRON TECHNOLOGY, INC. 发明人 YANG ZHAOHUI;BOETTIGER ULRICH C.
分类号 H01L21/00;H01L31/062 主分类号 H01L21/00
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