| 摘要 |
A Z-theta table includes a bed capable of undergoing linear displacement along the Z-axis and angular positioning. The table includes two rotary motors arranged in a substantially concentric manner with two fixed stators. The interior rotor includes a device for guiding an intermediary piece along the Z-axis, and the exterior rotor includes a threaded portion that provides a nut associated with a threaded portion of an intermediary part arranged between the two rotors. The exterior rotor and the intermediary piece provide a ball-screw system. Each of the two rotors is associated with an angular displacement sensor for the precise determination of their angular positions.
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