Automatic wafer tracking process and apparatus for carrying out the process

摘要

A semi-conductor wafer processing information system which includes a sensor responsive to the presence of a wafer at a monitored location of a processing machine to read the wafer identification scribe and send both wafer and machine identification signals to a host computer which may be independent of a wafer tracking system. The computer determines whether processing at the selected machine is appropriate. Wafer history information is updated when the wafer departs a given machine.