发明名称 |
Patterning method using coatings containing ionic components |
摘要 |
Disclosed is a method of forming a pattern by means of coatings containing an ionic component having a positive or negative electric charge using electrostatic attraction force and/or repulsion force. In the method, it is possible to significantly improve precision and efficiency of the pattern formation.
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申请公布号 |
US2007048448(A1) |
申请公布日期 |
2007.03.01 |
申请号 |
US20060504107 |
申请日期 |
2006.08.15 |
申请人 |
KIM DAE H;KIM JI S;SHIN DONG M;CHOI DONG C;CHOI KYUNG S;JI HO C;CHA GEUN Y;KIM SUNG H |
发明人 |
KIM DAE H.;KIM JI S.;SHIN DONG M.;CHOI DONG C.;CHOI KYUNG S.;JI HO C.;CHA GEUN Y.;KIM SUNG H. |
分类号 |
B05D3/12 |
主分类号 |
B05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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