| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an elastic surface wave actuator capable of completely moving a mover. <P>SOLUTION: The elastic surface wave actuator has a piezoelectric substrate 2; a stator 1 having a pair of interdigital electrodes 3, 4 which is disposed so as to face the surface of the piezoelectric substrate 2 at a predetermined distance, excites and oscillates an elastic surface wave to the piezoelectric substrate 2; the mover 5 which is placed on the surface of the piezoelectric substrate 2 and moved by the elastic surface wave; and a pre-load device which brings the mover 5 into contact with a stator 1 with the prescribed pressure N. The pair of interdigital electrodes 3, 4 is composed so as to reflect the interdigital electrodes side which faces the elastic surface wave which excites and oscillates the facing interdigital electrodes, and the elastic surface wave which advances in an identical direction is set so as to have an identical phase. <P>COPYRIGHT: (C)2007,JPO&INPIT |
