| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of determining precisely abnormality of airtightness in a gas supply part. <P>SOLUTION: This device for determining the abnormality of the airtightness determines the abnormality of the airtightness in the gas supply part provided with a gas passage through which gas flows, the first blocking means for blocking an upstream of the gas passage, and the second blocking means for blocking a downstream of the gas passage. The device for determining the abnormality of the airtightness is provided with a space part for storing gas flowing in from the gas passage between the first blocking means and the second blocking means, a blocking means provided between the gas passage and the space part to block the gas passage from the space part, a differential pressure sensor for detecting differential pressure between the gas passage and the space part, and a determining part for blocking the first blocking means from the second blocking means in the gas passage, by the first blocking means and the second blocking means, and for determining the abnormality of the airtightness in the gas supply part, based on the first detection value of the differential pressure when brought into the first state where the gas passage is blocked from the space part, by the blocking means. <P>COPYRIGHT: (C)2007,JPO&INPIT |
