| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate support which can reduce a triboelectric charge between a large area substrate and the substrate support. <P>SOLUTION: In one embodiment of the invention, a substrate support includes an electrically conductive body 202 having a substrate support surface that is covered by an electrically insulative coating 210. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 200 to about 2000 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body 210 having a surface finish on the portion of the body 202 adapted to support a substrate thereon of between about 200 to about 2000 micro-inches. In one embodiment, a substrate support assembly 200 includes an electrically conductive body 202 having a substrate support surface, a substrate support structure that is adapted to support the conductive body and the conductive body is covered by an electrically insulative coating 210. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
