| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor having small parasitic capacitance, where the space between a diaphragm and a fixed electrode is hermetically-sealed perfectly, and the connection between the fixed electrode and a pullout electrode is superior in reliability, and to provide a method for manufacturing the capacitive pressure sensor. SOLUTION: The capacitive pressure sensor 1 comprises a glass substrate 2, having a recessed section 2a and a wiring pullout groove 7 that is formed on one surface 2b; the fixed electrode 3 disposed in the recessed section 2a; the pullout electrode 8, having one end 8a being connected to the fixed electrode 3 and the other end 8b disposed in the wiring pullout groove 7; a glass-sealing material 5, with which a portion of the wiring pullout groove 7 is filled up, such that its upper surface 5a is flush with the one surface 2b; and a diaphragm substrate 4, which is made of Si and disposed on the side of the one surface 2b of the glass substrate 2 so as to face the fixed electrode 3. The capacitive pressure sensor 1 is characterized in that an anode junction section 6 which surrounds the recessed section 2a, is formed between the diaphragm substrate 4 and the one surface 2b of the glass substrate 2 and the upper surface 5a of the glass-sealing material 5. COPYRIGHT: (C)2007,JPO&INPIT
|
