| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which prevents short-circuiting by an anisotropy electric conduction adhesive from occurring while miniaturizing the electrostatic actuator by realizing the densification of an electrode mounting section, and to provide an IC package structure, a droplet discharging head, its manufacturing method, and a droplet discharging device equipped with the droplet discharging head. SOLUTION: This electrostatic actuator is equipped with a cavity board having a plurality of vibration plates, individual electrodes which respectively face the vibration plates, and an electrode board on which an electrode mounting section for setting a driver IC which feeds driving signals to the individual electrodes, and lead wiring for connecting the individual electrodes and the electrode mounting section are formed. The electrostatic actuator makes the vibration plates driven by an electrostatic force generated by the application of a voltage to the individual electrodes. The electrode mounting section is constituted of a plurality of mounting sections to be connected with each output terminal of the driver IC which is set in the electrode mounting section. The mounting section is constituted of four rows having two rows on one side. The mounting sections of two rows on one side is made a set, and each set is arranged at symmetrical positions. COPYRIGHT: (C)2007,JPO&INPIT
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