METHOD FOR THE PRODUCTION OF A MULTILAYER ELECTROSTATIC LENS ARRAY

摘要

The invention relates to a method for producing a multilayer electrostatic lens array comprising at least one lens electrode, particularly a method for producing a phase plate, as well as said lens array, said phase plate, and a transmission electron microscope encompassing said phase plate. The lens array or the phase plate is produced from a thin unsupported silicon nitride membrane that is mounted into a macroscopic chip while additional layers are deposited. The central bore and the aperture opening are milled out by means of an ion beam.