发明名称 |
RESIN COMPOSITION FOR BUMP FORMATION, BILAYER LAMINATED FILM FOR BUMP FORMATION, AND METHOD FOR FORMING BUMP |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative radiation sensitive bilayer laminated film for bump formation excellent in the printability of solder paste and pattern profile and easy to peel from a substrate, and a method for producing bumps using the same. <P>SOLUTION: A composition for a lower layer film of a bilayer laminated film used for bump formation is prepared which comprises (A) an alkali-soluble copolymer having a specific structural unit typified by poly-p-hydroxyphenylacrylamide and (B) an organic solvent. The bilayer laminated film is produced using the composition. Bumps are formed using the laminated film. <P>COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2007052351(A) |
申请公布日期 |
2007.03.01 |
申请号 |
JP20050238794 |
申请日期 |
2005.08.19 |
申请人 |
JSR CORP |
发明人 |
YOKOYAMA KENICHI;SAKAI YOKO;HASEGAWA SATOMI;OTA KATSU;IWANAGA SHINICHIRO |
分类号 |
G03F7/11;G03F7/004;G03F7/26;G03F7/40;H01L21/60 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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