发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method capable of preventing a bonding metal in assembling from being blown up without causing any disconnection between the surface and rear surface of a substrate in a via hole penetrating the substrate. SOLUTION: There is deposited a photosensitive and conductive organic resin film on the entire surface of a via hole on the surface side of the substrate on which elements are formed, deposited inside the via hole, and deposited on part or the entire surface of the rear surface in the via hole penetrating the substrate. Consequently, it is possible to form stable electric contact between the surface and the rear surface of the semiconductor. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007053225(A) 申请公布日期 2007.03.01
申请号 JP20050237179 申请日期 2005.08.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KITAZAWA TAKAHIRO
分类号 H01L21/3205;H01L23/52 主分类号 H01L21/3205
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