| 摘要 |
A measuring head ( 4 ) according to the invention comprises the combination of a zone lens ( 26 ), which is preferably a diffractive lens, with a hemispherical lens ( 23 ) or a GRIN lens ( 33 ). This represents a concept capable of miniaturization, resulting in very slender measuring heads ( 4 ) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.
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