MOVABLE COIL TYPE Z-AXIS LINEAR MOTOR, LINEAR MOTOR DRIVING STAGE, AND DEVICE FOR MANUFACTURING FUNCTIONAL FILM

摘要

PROBLEM TO BE SOLVED: To provide a high performance of movable coil type Z-axis linear motor which has a small-sized and inexpensive Z-axis locking mechanism. SOLUTION: This movable coil type Z-axis linear motor is provided with a stator where a magnetic circuit roughly U-shaped in cross section is made along a Z axis by a permanent magnet and a yoke, and a moving member which has a magnetic air gap being made along the above magnetic circuit and a multiphase coil being opposed via the above magnetic air gap to the magnetic pole of the above stator and is constituted to travel freely in the Z-axis direction within the above magnetic air gap. A rail for travelling on the Z-axis is laid on the external surface of the above yoke, and the above moving member travels along the above rail. COPYRIGHT: (C)2007,JPO&INPIT