PROCESSING DEVICE USING FOCUSING CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a processing device using a focusing charged particle beam which can cool a test piece rapidly and can improve processing precision by reducing thermal drift. SOLUTION: A test piece which is observed and processed by the focusing charged particle beam is made minute and only the minute test piece is locally cooled. Otherwise, a test piece mounting part which has a structure capable of attenuating thermal drift is used. COPYRIGHT: (C)2007,JPO&INPIT