| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card with a disposition space sufficiently secured thereon for a load member. SOLUTION: The contact unit 2 is disposed vertically movably relative to a main substrate 10 while the load member 52 disposed above the main substrate 10 is connected to a contact substrate 20 via a connection member 51. This makes it possible to sufficiently secure a disposition space for the load member 52 as compared with such a structure in which the load member 52 is disposed between the main substrate 10 and the contact unit 2, since the load member 52 is disposed above the main substrate 10 even if the thickness of the load member 52 is increased correspondingly to an overdrive load. COPYRIGHT: (C)2007,JPO&INPIT
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