发明名称 Trench plating process and apparatus for through hole vias
摘要 A method for forming through hole vias in a substrate uses a partially exposed seed layer to plate the bottom of a blind trench formed in the front side of a substrate. Thereafter, the plating proceeds substantially uniformly from the bottom of the blind hole to the top. To form the through hole, the rear face of the substrate is ground or etched away to remove material up to and including the dead-end wall of the blind hole.
申请公布号 US2007045820(A1) 申请公布日期 2007.03.01
申请号 US20050211624 申请日期 2005.08.26
申请人 INNOVATIVE MICRO TECHNOLOGY 发明人 RYBNICEK KIMON
分类号 H01L23/12;H01L21/00 主分类号 H01L23/12
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