摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a dynamic-pressure bearing which uses photo lithography technology for simplifying the formation of a dynamic-pressure groove on the inner hole wall of the small-sized dynamic-pressure bearing. <P>SOLUTION: The manufacturing method of the dynamic-pressure bearing includes steps of: providing the bearing having an inner hole; applying a photoresist to the surface of the inner hole wall of the bearing; and attaching an ultraviolet lamp having a groove pattern on its surface to the interior of the inner hole and performing exposure. Then the manufacturing method of the dynamic-pressure bearing also includes steps of: cleaning the photosensitive part of the photoresist by using a developing agent, and for exposing the inner hole wall; and performing etching on the inner hole wall which is not protected by the photoresist, by using an etching solution and for forming a groove. <P>COPYRIGHT: (C)2007,JPO&INPIT |