| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which changes a target tank in a gas supply device having a plurality of tanks after sufficiently utilizing gas in the target tank. <P>SOLUTION: The gas supply device comprises: the plurality of tanks; a gas passage including a common passage, which is the gas passage for circulating a gas connected with the plurality of tanks and supplied to the target device, and commonly circulates the gas delivered from each tank; and a selection section for selecting a tank supplying gas from the plurality of tanks to the common passage as the target tank. When determining that a residual amount of the gas in the target tank is less than a designated amount and a flow rate of gas supplied from the target tank to the target device is insufficient, the selection section changes the target tank from a first tank to a second tank. <P>COPYRIGHT: (C)2007,JPO&INPIT |
