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发明名称
Vorrichtung zum Greifen einer Vielzahl von Substraten
摘要
申请公布号
DE10308842(B4)
申请公布日期
2007.03.01
申请号
DE20031008842
申请日期
2003.02.27
申请人
ASTEC HALBLEITERTECHNOLOGIE GMBH
发明人
NIESE, MATTHIAS;FRANZKE, JOERG
分类号
B65G47/90;B65G49/05;H01L21/677;H01L21/687
主分类号
B65G47/90
代理机构
代理人
主权项
地址
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