SUBSTRATE PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

摘要

A substrate processing unit, by employing the processing unit to carry out different processings with different processing liquids, can make a reduction in the space for carrying out the entire process of substrate processing and a reduction in the energy necessary for substrate transportation. The substrate processing unit includes: a vertically-movable substrate holder (72) for holding a substrate (W); a pan (70) surrounding the periphery of the substrate holder (72); a cell (74), located below the substrate holder (72) and within the pan (70), having in its interior a chemical processing section (84) ; and a spray processing cup (74), capable of closing the top opening of the cell (74), having a plurality of spray nozzles (116, 118) for separately spraying at least two types of processing liquids; wherein the pan (70) and the cell (74) has liquid discharge lines (78, 92) individually.