Magnetic bearing device with an improved vacuum feedthrough

摘要

A magnetic bearing device (1) with an improved vacuum-tight electrical feedthrough through its housing (10) is disclosed. The feedthrough (30) comprises a flat connection element (31) such as a rigid or flexible printed circuit board extending through the wall of the housing (10), preferably all the way along an inner circumference of the housing. The connection element is sealed in a gas-tight manner to the housing. The element preferably has a central opening (36) for receiving the rotor shaft. Connections to the bearing units and sensors may be achieved by flat-ribbon cables (51) or flexprints. The sensors are preferably also implemented as printed sensors. Thus a very compact and cost-efficient magnetic bearing device can be obtained. An alternative embodiment uses a connection element on a side wall of the housing as a feedthrough to the bearing components.