| 摘要 |
<p>A high-frequency discharge excited gas laser oscillator (1) receiving power from a laser power supply (15) controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section (18) for detecting supply power from the laser power supply to a discharge tube (3) and a pulse command control circuit (19) positioned at an upstream side of the laser power supply, comparing an allowable upper limit value (W) of supply power found from a relationship between a discharge tube temperature and supply power and an actual supply power detected by the power detecting section, stopping the pulse command value to the discharge tube when the supply power is higher than the allowable upper limit value, and setting a pulse command value based on the allowable upper limit value.</p> |
