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发明名称
Method of forming a nanocluster charge storage device
摘要
申请公布号
KR20070023770(A)
申请公布日期
2007.02.28
申请号
KR20067027147
申请日期
2006.12.22
申请人
发明人
分类号
H01L21/336;H01L21/20
主分类号
H01L21/336
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代理人
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