Method and apparatus for reducing optical crosstalk in cmos image sensors

摘要

An image sensor in which the metal interconnects are coated with an anti-reflective coating is disclosed The top, bottom and sides of the metal interconnects may be coated to reduce reflection from all directions. The thickness of the coating is chosen to suppress reflection of light of certain wavelengths incident at certain expected angles. In particular, the thickness of the coating may be chosen to reduce reflections from neighboring pixels. The metal may be coated in multiple layers of anti-reflective coating to suppress multiple wavelengths of light or multiple angles of incidence.