SYSTEM AND METHOD FOR CANCELING DISTURBANCE IN MEMS DEVICES

摘要

A system and method for canceling disturbance in a MEMS device. The system 200 includes a MEMS device 203 , which may include a substrate 205 and a plurality of individually movable MEMS elements 203 - 1 through 203 -N, and a control assembly 207 . The optical system 200 may be utilized in and/or form a portion of any optical apparatus employing an array of MEMS devices. The control assembly 207 uses feed-forward control signals to cancel disturbance in the MEMS device 203 , and more particularly, to cancel disturbance in the non-switched or static mirrors of the MEMS device 203 caused by switched or moving mirrors.