发明名称 |
Film forming apparatus and method of film formation |
摘要 |
<p>A film forming apparatus includes a film forming chamber for performing a film formation; an exhaust unit connected to the film forming chamber to discharge a gas out of the film forming chamber; a holder provided in the film forming chamber to hold a process-objective material; a jetting nozzle provided in the film forming chamber on which a jetting port is formed in a slit shape, and jetting an aerosol containing particulate material to form a film made of the particulate material on the process-objective material; and a shielding member provided at a side of the jetting port in a longitudinal direction of the jetting port to cover a side of a jet flow of the aerosol jetted from the jetting port. Accordingly, it is possible to suppress a turbulence of a flow of the aerosol due to an exhaust flow, and to form the film uniformly.</p> |
申请公布号 |
EP1757372(A1) |
申请公布日期 |
2007.02.28 |
申请号 |
EP20060017584 |
申请日期 |
2006.08.23 |
申请人 |
BROTHER KOGYO KABUSHIKI KAISHA;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY |
发明人 |
YASUI, MOTOHIRO;AKEDO, JUN |
分类号 |
B05D1/02;B05B1/26;B05B13/02 |
主分类号 |
B05D1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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