发明名称 METHOD OF MANUFACTURING RESONATOR PIECES
摘要 <p>DISCLOSED IS A METHOD OF MANUFACTURING RESONATOR PIECES WHICH REQUIRES NO SKILLED HANDWORK, CAN AUTOMATE WORKING STEPS, AND CAN IMPROVE THE YIELD AND WORKING ENVIRONMENT IN MANUFACTURE OF THE RESONATOR PIECES. AN ANAEROBIC ADHESIVE WHICH IS SOLUBLE IN WATER AND HARDENED UPON IRRADIATION OF ULTRAVIOLET RAYS IS PERMEATED INTO A QUARTZ CRYSTAL WAFER GROUP FORMED BY LAMINATING QUARTZ CRYSTAL WAFERS BETWEEN TWO DUMMY PLATES. AFTER ADJUSTING A FILM THICKNESS OF ADHESIVE COATINGS, THE ADHESIVE IS HARDENED BY IRRADIATING THE ULTRAVIOLET RAYS. AFTER CUTTING THE QUARTZ CRYSTAL WAFER GROUP IN A FIRST DIRECTION, RESULTED INTERMEDIATE STRIPS ARE BONDED SIDE BY SIDE IN A SANDWICHED STATE BETWEEN TWO DUMMY PLATES FROM ABOVE AND BELOW, AND A RESULTED ASSEMBLY IS CUT IN A SECOND DORECTION PERPENDICULAR TO THE FIRST DIRECTION. THE DUMMY PLATES ARE THEN REMOVED. AFTER SWELLING AND DISSOLVING THE ADHESIVE IN A CIRCULATORY OVERFLOW TANK CONTAINING A SOLVENT, THE DUMMY PLATES ARE REMOVED AND INDIVIDUAL RESONATOR PIECES ARE OBTAINED SUBSEQUENT TO CLEANING THEREOF.(FIG. 4)</p>
申请公布号 MY128930(A) 申请公布日期 2007.02.28
申请号 MY1997PI01290 申请日期 1997.03.26
申请人 SEIKO EPSON CORPORATION 发明人 HIKARU SHIROTA;KAZUO KARASAWA;KATSUMI SUZUKI;MASANOBU FUJISAKI
分类号 C30B29/18;H01L41/09;B28D5/00;C30B33/00;H01L41/39;H03H3/02 主分类号 C30B29/18
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