发明名称 METHOD OF INHIBITING PRODUCTION OF PROJECTIONS IN METAL DEPOSITED-FILM
摘要 A METHOD OF INHIBITING PRODUCTION OF PROJECTIONS IN A METAL DEPOSITED-FILM ACCORDING TO THE PRESENT INVENTION IS CHARACTERIZED BY USING A VAPOR DEPOSITION APPARATUS COMPRISING, IN A VACUUM-TREATING CHAMBER, AN EVAPORATING SECTION FOR A DEPOSITING MATERIAL, AND AN ACCOMMODATING MEMBER AND/OR A HOLDING MEMBER FOR ACCOMMODATION AND/OR HOLD OF WORK PIECES, RESPECTIVELY, AND, IN DEPOSITING A METAL DEPOSITING MATERIAL ON EACH OF THE SURFACE OF THE WORK PIECES WITH THE ACCOMMODATING MEMBER AND/OR THE HOLDING MEMBER BEING MADE ROTATED ABOUT THE HORIZONTAL ROTATIONAL AXIS THEREOF, CARRYING OUT VAPOR DEPOSITION WITH A VICKERS HARDNESS OF A FILM FORMED ON EACH OF THE SURFACE OF THE WORK PIECES MAINTAINED AT 25 OR MORE. ACCORDING TO THE PRESENT INVENTION, PRODUCTION OF PROJECTIONS IN A METAL DEPOSITED-FILM CAN BE EFFECTIVELY INHIBITED WHEN FORMING THE METAL DEPOSITED-FILM OF ALUMINUM, ZINC OR THE LIKE ON THE SURFACE OF A WORK PIECE SUCH AS A RARE EARTH METAL-BASED PERMANENT MAGNET. (FIG. 1)
申请公布号 MY128597(A) 申请公布日期 2007.02.28
申请号 MYPI20013227 申请日期 2001.07.06
申请人 NEOMAX CO., LTD. 发明人 TAKESHI NISHIUCHI;FUMIAKI KIKUI;YOSHIMI TOCHISHITA
分类号 C23C14/50;C23C14/22;C23C14/54;H01F41/02 主分类号 C23C14/50
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