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发明名称
MASK AND MANUFACTURING METHOD USING MASK
摘要
申请公布号
EP1520208(B1)
申请公布日期
2007.02.28
申请号
EP20030740910
申请日期
2003.06.13
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
FRENCH, IAN D.;HEWETT, JAMES
分类号
G03F1/00;H01L21/027
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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