| 摘要 |
A stage for placing a target object thereon includes, on a side surface of a stage main body having an upper surface, a lower surface, and the side surface, a side surface protection cover layer. The side surface protection cover layer isolates at least part of the side surface of the stage main body from an ambient atmosphere of the stage main body. The stage main body further includes an upper electrode on its upper surface and a lower electrode on its lower surface. At least the surface of the side surface protection cover layer is conductive. The stage can further include a potential control mechanism and a guard potential setting mechanism.
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