Superconducting magnetic field generation apparatus and sputter coating apparatus

摘要

A superconducting magnetic field generating apparatus includes a superconducting body for generating a magnetic field below a critical temperature of the superconducting body, a thermal insulation vessel having a space for accommodating the superconducting body, and a ferromagnetic body for adjusting a magnetic field distribution generated from the superconducting body wherein at least a part of the ferromagnetic body is disposed around the superconducting body and a magnetic circuit is formed so as to form the magnetic field distribution in a common side of the superconducting body and the part of the ferromagnetic body.