发明名称 |
System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment |
摘要 |
Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.
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申请公布号 |
US7184852(B2) |
申请公布日期 |
2007.02.27 |
申请号 |
US20040819680 |
申请日期 |
2004.04.07 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LEE HSING-HUNG;SUN KING-CHUAN;SHEN YOU-WEI;LEE YAO-CHIN |
分类号 |
G06F19/00;G06Q10/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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