发明名称 System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment
摘要 Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.
申请公布号 US7184852(B2) 申请公布日期 2007.02.27
申请号 US20040819680 申请日期 2004.04.07
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LEE HSING-HUNG;SUN KING-CHUAN;SHEN YOU-WEI;LEE YAO-CHIN
分类号 G06F19/00;G06Q10/00 主分类号 G06F19/00
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