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发明名称
VACUUM BLOCK FOR FIXING SUBSTRATE AND MACRO INSPECTOR HAVING THEREOF
摘要
申请公布号
KR100687444(B1)
申请公布日期
2007.02.27
申请号
KR20040088380
申请日期
2004.11.02
申请人
发明人
分类号
H01J9/42
主分类号
H01J9/42
代理机构
代理人
主权项
地址
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