| 摘要 |
A moving table supports a parts conveying member. A fixed table is disposed below the moving table and supports the moving table so as to freely vibrate the moving table through a vibration generator. The vibration generator includes a first elastic member and a piezoelectric element mounted to the first elastic member. One end of the first elastic member is fixed to the moving table and the other end is fixed to the fixed table. A support member includes a second elastic member. One of the second elastic member is fixed to the moving table and the other end member is fixed to the fixed table. Accordingly, the piezo-driven parts feeder can be reduced in height, the stress that acts on the vibration generator can be restricted, sufficient amplitude can be ensured and the stress on the vibration generator can be restricted even during high-frequency driving, and the replacement of the vibration generator and the change and control of the resonance frequency can easily be performed.
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