发明名称 WIRE BONDING METHOD FOR COPPER INTERCONNECTS IN SEMICONDUCTOR DEVICES
摘要 The present invention uses wire bonding technology to bond interconnect materials that oxidize easily by using a wire with stable oxidation qualities. A passivation layer is formed on the semiconductor substrate to encapsulate the bonding pad made from the interconnect material such that the wire bonds with the passivation layer itself, not with the interconnect material. The passivation layer is selected to be a material that is metallurgically stable when bonded to the interconnect material. Since the wire is stable compared with the interconnect material, i.e., it does not readily corrode, a reliable mechanical and electrical connection is provided between the semiconductor device (interconnect material) and the wire, with the passivation layer disposed therebetween.
申请公布号 KR100687994(B1) 申请公布日期 2007.02.27
申请号 KR20000078613 申请日期 2000.12.19
申请人 发明人
分类号 H01L21/60;H01L21/607;H01L23/485 主分类号 H01L21/60
代理机构 代理人
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