High aspect ratio tip atomic force microscopy cantilevers and method of manufacture

摘要

The present invention provides a method for the selective growth of single carbon nanotubes (CNT) on the tip apex of a conventional cantilever. Selective CNT growth is established by coating the backside of a cantilever, having a through-hole at a tip apex, with a catalyst material followed by a cover layer. The exposed catalyst at the bottom of the hole at the apex of the cantilever induces growth of a single CNT at this location.