发明名称 LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
摘要 <p>A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.</p>
申请公布号 KR100687995(B1) 申请公布日期 2007.02.27
申请号 KR20027016688 申请日期 2001.05.08
申请人 发明人
分类号 H01L21/304;A47L25/00;B08B7/00;C11D11/00;H01L21/00 主分类号 H01L21/304
代理机构 代理人
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