PLASMA PROCESSING DEVICE AND METHOD,申请号KR20067026949-传众专利搜索

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发明名称	PLASMA PROCESSING DEVICE AND METHOD
摘要
申请公布号	KR20070022781(A)	申请公布日期	2007.02.27
申请号	KR20067026949	申请日期	2005.06.21
申请人		发明人
分类号	H01J37/32;H01L21/3065;H01L21/311	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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