发明名称 |
Liftoff process for thin photoresist |
摘要 |
A method is invented for processing a thin-film head/semiconductor wafer. A layer of polymer is applied onto a wafer. A layer of dielectric material is added above the polymer layer. A layer of photoresist is added above the dielectric layer. The photoresist layer is patterned using a photolithography process. Exposed portions of the dielectric layer are removed. Exposed portions of the polymer layer are removed. Exposed portions of the wafer are removed. The polymer layer and any material thereabove is removed after hard bias/leads deposition.
|
申请公布号 |
US7183224(B2) |
申请公布日期 |
2007.02.27 |
申请号 |
US20030631579 |
申请日期 |
2003.07.30 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
LEE KIM Y.;WANG CHUN-MING |
分类号 |
H01L21/302;G11B5/147;G11B5/31;H01L21/00;H01L21/027;H01L21/461 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|