Physical quantity sensor and method for manufacturing the same

摘要

A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.