METHOD FOR DECHUCKING SUBSTRATE FROM ESC AND METHOD FOR COOLING SUBSTRATE

摘要

A method for dechucking a substrate from ESC(Electro-Static Chuck) and a method for cooling a substrate are provided to enhance cooling efficiency of a substrate and check a dechucking state by adjusting a supplying state of cooling gas supplied to a lower electrode. Cooling gas is supplied to an opening/shutting valve(12) and a bypass valve(13) while the opening/shutting valve and the bypass valve are in opening states. A pressure valve setting process is performed to set a pressure valve of the cooling gas. The pressure value is maintained by supplying continuously the cooling gas. A flow rate of the cooling gas is measured during a cooling gas supply process.